High Potential Columnar Nanocrystalline AlN Films Deposited by RF Reactive Magnetron Sputtering
نویسندگان
چکیده
منابع مشابه
Nanocrystalline GaN and GaN:H Films Grown by RF-Magnetron Sputtering
The structural and optical properties of nanocrystalline GaN and GaN:H films grown by RF-magnetron sputtering are focused here. The films were grown using a Ga target and a variety of deposition parameters (N2/H2/Arflow rates, RF power, and substrate temperatures). Si (100) and fused silica substrates were used at relatively low temperatures (Ts ≤ 420K). The main effects resulting from the depo...
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ژورنال
عنوان ژورنال: Nano-Micro Letters
سال: 2012
ISSN: 2311-6706,2150-5551
DOI: 10.1007/bf03353690